Analysis on the Effect of Machining Error on the Vibration of MEMS Device

Abstract:

With the development of MEMS, more attention has been paid to the uniformity between the performance of the products in practical processing and the expected performance. A case study is conducted here with fixed-fixed beam and comb-drive resonator as the pattern to explore how geometry size deviation and geometry shape error influence the devices. It is discovered that the length, inclining profile and undercutting of the anchor is the key factor which influences the vibration mode of the fixed beam, and the geometry size and corrugating profile mainly affect the comb-drive resonator.

• Periodical: Key Engineering Materials (Volumes 645-646)
• Pages: 859-864
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.645-646.859
• Online since: May 2015
• Authors: Hui Wang, Wei Hua Li*, Li Li Gao
• Keywords: Frequency, Geometry Shape Error, Geometry Size Deviation, MEMS, Vibration

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