Effect of Type and Coating Time of Interlayer on Properties and Morphology of Cr-Zr-N Film Prepared by DC Magnetron Sputtering PVD on H13 Steel

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Adhesion, hardness and surface morphology are important properties of thin film coated by PVD. Interlayer lying between substrate and coating layer plays an important role on these properties. In this research, type and thickness of interlayer for Cr-Zr-N film are varied to investigate their effect on properties of film. Cr, Zr and mixed Cr+Zr interlayer were selected for this research. Thickness of interlayer was varied by varying coating time from 5 to 45 min. The effect of interlayer on formation of Cr-Zr-N film was analyzed by XRD. Surface morphology was observed by OM, SEM and AFM. Hardness and adhesion were measure by nanoindentation tester and scatch tester. This research found that for surface morphology and hardness, Cr+Zr is the most appropriate interlayer while Zr interlayer provides the best adhesion properties.

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111-119

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July 2015

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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