An Assessment of Chemical Vapor Deposition Synthesis of SnO₂ Nanowires by Statistical Design

Abstract:

This paper studies the chemical vapor deposition (CVD) synthesis conditions for tin oxide (SnO₂) nanowires (NWs) by using statistical design of experiment (DOE). The influences of synthesis parameters (growth temperature, deposition time and flow rate of argon) on SnO₂ NWs diameter were studied. From perturbation analysis with DOE, it was found that temperature gave the most significant effect to the diameter of SnO₂ NWs via CVD method followed by flowrate of argon and deposition time. Furthermore, based on the cube graph, the smallest SnO₂ NWs (~18 nm) can be obtained at temperature of 850 °C with argon flow rate of 100 sccm using a deposition time of 60 min. On the other hand, the largest SnO₂ NWs (~248 nm) can be produced at 900 °C.

• Periodical: Key Engineering Materials (Volume 701)
• Pages: 52-56
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.701.52
• Online since: July 2016
• Authors: Maisara Azad Mat Akhir, Khairudin Mohamed, Sheikh Abdul Rezan*, Hooi Ling Lee, Siti Suhaila M. Izah
• Keywords: Chemical Vapor Deposition, SnO₂ Nanowires, Statistical Design of Experiment

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