For Libraries For Publication Open Access Downloads About Us Contact Us
Paper Titles
Plasma-Enhanced Atomic Layer Deposition of GaN Thin Film at Low Temperature
p.907
Effects Studying of Annealing to Mechanical Properties Carbon-Doped Ti-O Films Synthesized Using CO2 Gas
p.915
Fast Thermal Annealing of CH3NH3PbI3-xClx Films for Improving Hybrid Photovoltaics
p.923
Research on the Properties of Sol-Gel Deposited WO3-NiO Thin Films
p.929
The Effects of the Carrier Concentrations on the Hall Mobilities of ZnO:Al Thin Films Deposited by Magnetron Sputtering
p.938
Radio Frequency (RF) Magnetron Sputtered Barium Strontium Titanate (BST) Thin Film
p.942
Preparation of Coated ZrSiO4-ZrB2 Using Sol-Gel Method and its Oxidation Resistance
p.947
ZrSi2-SiC/SiC Anti-Oxidant Coatings Prepared on Graphite Spheres by Two-Step Pack Cementation Process
p.953
Application of Mg-Al Layered Double Hydroxides Composite Fillers in the Water-Based Heat Insulation Coating
p.959

The Effects of the Carrier Concentrations on the Hall Mobilities of ZnO:Al Thin Films Deposited by Magnetron Sputtering

Article Preview

Abstract:

ZnO:Al thin films were deposited on flexible substrates by magnetron sputtering. The effects of the carrier concentrations on the hall mobilities of AZO films were investigated. When the carrier concentration was high (~1020/cm3), the hall mobility decreased with increase of the carrier concentration, showing obvious characteristics of ionized impurity scattering; moreover, the carrier mobility could be expressed to be-2.14/3 proportional of the carrier concentration by combining the results of simulation and experiments.simulation and experiment. When the carrier concentration was about a magnitude of 1019 cm-3, the carrier mobility is influenced by the carrier concentration and grain size, which means the carrier mobility was affected by both the grain boundary scattering and ionized purity scattering mechanism.

You might also be interested in these eBooks
Functional Materials Research II View Preview

Info:

Periodical:

Key Engineering Materials (Volume 727)

Pages:

938-941

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.727.938

Citation:

Cite this paper

Online since:

January 2017

Authors:

Xiao Jing Wang*, Yun Zhang

Keywords:

Electrical Property, Modeling, Simulation, Solar Energy Materials, Sputtering, Thin Films

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2017 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

References

[1] S. PYong, S.S. Moon ,S.K. Jin and J.Y. Lee : Mater Res Bull Vol. 48(2013), p.5136.

Google Scholar

[2] K.H. Ri , Y.B. Wang , W.L. Zhou , J.X. Gao , X.J. Wang and J. Yu : Appl Surf Sci Vol. 257(2011), p.5471.

Google Scholar

[3] S. Fernandez , J.D. Santos , C. Munuera , M. Garcia-Hernandez and F.B. Naranjo : Sol Energy Mater Sol Cells Vol. 133(2015), p.170.

Google Scholar

[4] T. Dimopoulos, M. Bauch, R.A. Wibowo, N. Bansal, R. Hamid, M. Auer, M. Jäger and E.J.W. List-Kratochvil: Mater Sci Eng B Vol. 200( 2015), p.84.

DOI: 10.1016/j.mseb.2015.06.008

Google Scholar

[5] W.T. Yen , Y.C. Lin and J.H. Ke: Appl Surf Sci Vol. 257(2010), p.960.

Google Scholar

[6] M. Berginski, J. Hupkes, W. Reetz, B. Rech and M. Wuttig: Thin Solid Films Vol. 516 (2008), p.5836.

DOI: 10.1016/j.tsf.2007.10.029

Google Scholar

[7] Y.H. wang,H.M. Kim , Y.H. Um and H.Y. Park: Mater Res Bull Vol. 47( 2012), p.2487.

Google Scholar

[8] D.K. Kim and H.B. Kim: Superlattice Microst Vol. 85( 2015), p.50.

Google Scholar

[9] C.S. Hao, M.M. Shirolkar ,J.N. Li, B.J. Wu, S.L. Yin,M. Li and H.Q. Wang: Appl Surf Sci Vol. 351 ( 2015), p.392.

Google Scholar

[10] K. Ellmer and R. Mientus: thin Solid Films Vol. 516( 2008), p.5829.

Google Scholar

[11] T. Minami, H. Sato, K. Ohashi, T. Tomofuji and Takata S: J Crystal Growth Vol. 117( 1992), p.370.

Google Scholar

[12] X.J. Wang, Q.S. Lei, W. Xu,W.L. Zhou and J. Y: Mater Lett Vol. 63( 2009), p.1371.

Google Scholar

[13] T. Schuler and M.A. Aegerter: Thin Solid Films Vol. 351( 1999), p.125.

Google Scholar

[14] P.A. Wolff : Phys Rev Vol. 126( 1962), p.405.

Google Scholar

© 2025 Trans Tech Publications Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies. For open access content, terms of the Creative Commons licensing CC-BY are applied.
Scientific.Net is a registered trademark of Trans Tech Publications Ltd.