Synthesis and Characterization of Cu-Doped SnO₂ Thin Films by Aerosol Pyrolysis Technique for Gas Sensor Application

Abstract:

Thin films of un-doped and Cu-doped tin oxide were synthesized on quartz substrates by the purpose-built aerosol pyrolysis apparatus from 0.2 M SnCl₄.5H₂O – ethanol solution. CuCl₂.2H₂O was used as a source of Cu dopant. The Cu dopant of 1, 3 and 5 wt.% were used for doping SnO₂ film. The morphological, structural, optical and electrical properties under the influence of the Cu-doping was examined by FE-SEM, XRD, UV-Vis transmission spectroscopy and Hall effect measurement technique. XRD patterns of all films exhibited rutile-phase SnO₂. The doping content of 1%Cu improved the film crystallinity. The Cu doping content decreased optical bandgap from 4.36 eV for undoped SnO₂ to 4.28 eV for 3%Cu-doped SnO₂. The further Cu doping content increased the bandgap energy to 4.32 eV. The resistivity was increased for doping of Cu 1% but it was decreased with further increasing in Cu-doping contents

• Periodical: Key Engineering Materials (Volume 766)
• Pages: 205-210
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.766.205
• Online since: April 2018
• Authors: S.Tipawan Khlayboonme*, Warawoot Thowladda
• Keywords: Crystallinity Parameters, Cu-Doped Tin Oxide, Ultrasonic Aerosol Pyrolysis

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