Optical and Electrical Properties of Diamond-Like Carbon Thin Film with Deposition by ECR-CVD System

Abstract:

In this paper, evolution of optical and electrical properties of diamond-like carbon (DLC) films deposited by ECR-CVD system are reported. By varying the deposition different substrates bias (0, -55, -100 V) and volume amount of C₂H₂ from 40 to 55 cc onto substrate Si/TiN and quarts. The structure of the DLC films were analyzed from Raman spectroscopy. DLC films deposited bias at-100 V and C₂H₂ at 40 cc show excellent optical transmittance and high resistivity. As a result, I_D/I_G ratio corresponds to the optical transmittance and resistivity with I_D/I_G ratio decreased making the film like to the diamond. Most importantly, the transparency and resistivity properties of the DLC films can be tailored to approaching diamond by adjusting substrates bias and volume C₂H₂, is important to many applications, which is improve film properties.

• Periodical: Key Engineering Materials (Volume 814)
• Pages: 47-52
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.814.47
• Online since: July 2019
• Authors: Tanawit Srisantirut, Weera Pengchan*
• Keywords: Diamond, Diamond-Like Carbon (DLC), ECR-CVD, Raman, Thin Film

References

[1] A. Grill, Diamond-like carbon: state of the art,, Diamond and Related Materials 8, 1999, pp.428-434.

DOI: 10.1016/s0925-9635(98)00262-3

[2] K. OOHIR, Characteristics and Applications of DLC film,, NTN TECHNICAL REVIEW No.77, 2009 pp.90-95.

[3] H. MORIGUCHI, H. OHARA and M. TSUJIOKA, History and Applications of Diamond-Like Carbon Manufacturing Processes,, SEI TECHNICAL REVIEW No. 82, 2016 pp.52-58.

[4] Gil Capote, Luís F. Bonetti, Lúcia V. Santos, Vladimir J. Trava-Airoldi and Evaldo J. Corat, Adherent Diamond-Like Carbon Coatings on Metals Via PECVD and IBAD,, Brazilian Journal of Physics vol.36, 2006 pp.986-989.

DOI: 10.1590/s0103-97332006000600050

[5] F. Cerny, J. Gurovic and J. Smolik, Properties of DLC and CNx PECVD coatings,, Superficies y Vacío 9, 1999 pp.128-130.

[6] S.B. Sing, A.K. Poswal, M. Pandey, R.B Tokas, N. Chand, S. Dhara and B.Sundralvel, X-ray reflectivity studies on DLC films deposited by microwave ECR CVD: Effect of substrate bias,, Surface & Coating Technology 203, 2009 pp.986-991.

DOI: 10.1016/j.surfcoat.2008.09.022

[7] Chang Hyun Lee and Koeng Su Lim, Boron-doped amorphous diamodlike carbon as a new p-type window material in amorphous silicon p-i-n solar cell,, Applied Physics Letters 72, 19998 pp.106-108.

DOI: 10.1063/1.120659

[8] C.W. Chen and J. Robertson, Doping mechanism in tetrahedral amorphous carbon,, Pergamon carbon 37, 1999 pp.839-842.

DOI: 10.1016/s0008-6223(98)00281-4

[9] A. Ferrari, Determination of bonding in diamond-like carbon by Raman spectroscopy,, Diamond and Materials 11, 2002 pp.1053-1061.

DOI: 10.1016/s0925-9635(01)00730-0

[10] C.T. Guo, K.-H. Dittrich, Appl. Surf, Sci. 253, 2007 p.4935.

[11] A.C. Ferrari, J. Robertson, Phys. Rev, B 64, 2001 p.075414.

[12] H.Y. Ueng, C.T. Guo and K.-H. Dittrich, Development of Hybrid Coating Process for Deposition of Diamond-Like Carbon Films on Microdrills,, Surface and Coating Technology 200, 2006 pp.2900-2908.

DOI: 10.1016/j.surfcoat.2005.01.122

[13] Cui W.G., Lai Q.B., Zhang L., and Wang F.M., Quantitative measurement of sp3 content in DLC films with Raman spectroscopy,, Surface and Coating Technology 205, 2010 pp.1995-1999.

DOI: 10.1016/j.surfcoat.2010.08.093

[14] J. Robertson, Diamond-like amorphous carbon,, Materials Science and Engineering R37, 2002 pp.129-281.

[15] Adliene D, Laurikaitiene J, Kopustinskas V and Meskinis S Mater Sci Eng 06,, 2008 p.005.