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HomeKey Engineering MaterialsKey Engineering Materials Vol. 984Monitoring of Graphene Properties in the Process...

Monitoring of Graphene Properties in the Process of Viral Biosensor Manufacturing

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Abstract:

The properties of graphene chips with low reproducibility (LR) after photolithography (PLG) and graphene functionalization have been studied. It is shown that the introduction of additional cleaning after PLG can significantly increase the reproducibility of the parameters of processed graphene in biosensors. The use of dilute PBS solutions for virus detection makes it possible to increase the relative concentration sensitivity of biosensors by several times.

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20th International Conference on Silicon Carbide and Related Materials (ICSCRM 2023)

Materials Application in Quantum, Sensors and Mechatronics Systems

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Periodical:

Key Engineering Materials (Volume 984)

Pages:

23-28

DOI:

https://doi.org/10.4028/p-r3BQ9j

Citation:

Cite this paper

Online since:

August 2024

Authors:

Alexander A. Lebedev*, Natalia M. Shmidt, Evgeniya I. Shabunina, Alexey V. Nashchekin, Ekaterina V. Gushchina, Vasiliy N. Petrov, Ilya A. Eliseev, Sergey P. Lebedev, Sergei Iu. Priobrazhenskii, Alexander D. Roenkov, Elena M. Tanklevskaya, Mikhail V. Puzyk, Alexander S. Usikov, Sergey A. Klotchenko, Andrey V. Vasin, Anton Yu. Plehanov, Vladimir A. Golyashow, Oleg Evgenievich Tereshchenko

Keywords:

Graphene Chip, Photoresist Residues, Surface Topography, Viral Biosensors

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Creative Commons CC BY 4.0

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* - Corresponding Author

[1] Y. Bai, T. Xu, X. Zhang, Graphene-Based Biosensors for Detection of Biomarkers. Micromachines. 11 (2020) 60-72.

[2] Y. Xiao, Y.X Pang, Y. Yan. P. Qian, H. Zhao, S. Manickam, T.Wu, C.H. Pang, Synthesis and Functionalization of Graphene Materials for Biomedical Applications: Recent Advances, Challenges, and Perspectives, Adv. Sci. 10 (2023) 2205292.

DOI: 10.1002/advs.202205292

[3] S. Wang, X. Qi, D. Hao, Review—Recent Advances in Graphene-Based Field-Effect-Transistor Biosensors: A Review on Biosensor Designing Strategy. J. Electrochem. Soc. 169 (2022) 027509.

DOI: 10.1149/1945-7111/ac4f24

[4] R.M. Torrente-Rodriguez, H. Lukas, J. Tu, et al. A Graphene-Based Multiplexed Telemedicine Platform for Rapid and Low-Cost COVID-19. Nat. Biotechnol. 38 (2020) 217.

[5] A.A. Lebedev, S.Y. Davydov, I.A. Eliseyev, et al. Graphene on SiC Substrate as Biosensor: Theoretical Background, Preparation, and Characterization. Materials 14 (2021) 590.

DOI: 10.3390/ma14030590

[6] N.M. Shmidt, A.S. Usikov, E.I. Shabunina, et al. Investigation of the morphology and electrical properties of graphene used in the development of biosensors for detection of influenza viruses. Biosensors 12 (2022) 8-26.

DOI: 10.3390/bios12010008

[7] Z. Tehrani, G. Burwell, M. A. Mohd Azmi, Generic epitaxial graphene biosensors for ultrasensitive detection of cancer risk biomarker. 2D Materials 1 (2014) 025004.

DOI: 10.1088/2053-1583/1/2/025004

[8] I.A. Eliseev, E.A. Gushchina, S.A. Klotchenko, et al. Modification in adsorption properties of graphene during the development of viral biosensors. Semiconductors 56 (2022) 908.

[9] A. Choi, A. T. Hoang, T. T. Ngoc Van, B. Shong, et al. Residue-free photolithographic patterning of graphene. Chem. Eng. J. 429 (2022), 132504.

DOI: 10.1016/j.cej.2021.132504

[10] S.-W. Lee, M. Muoth, T. Helbling, M. Mattmann, C. Hierold Suppression of resist contamination during photolithography on carbon nanomaterials by a sacrificial layer. Carbon 66 (2014) 295.

DOI: 10.1016/j.carbon.2013.09.003

[11] S. Eissa, J.G. Contreras, F. Mahvash, et al. Functionalized CVD Monolayer Graphene for Label-Free Impedimetric Biosensing. Nano Res. 8 (2015) 1698–1709.

DOI: 10.1007/s12274-014-0671-0

[12] V. Georgakilas, M. Otyepka, A. B. Bourlinos, et al. Functionalization of Graphene: Covalent and Non-Covalent Approaches, Derivatives and Applications. Chem. Rev. 112 11 (2012) 6156−6214.

DOI: 10.1021/cr3000412

[13] A.C. Ferrari, D.M. Basko, Raman spectroscopy as a versatile tool for studying the properties of graphene. Nat. Nanotechnol. 8 (2013) 235–246.

DOI: 10.1038/nnano.2013.46

[14] F. Fromm, M. H. Oliviera Jr., A. Molina-Sanchez, et al. Contribution of the buffer layer to the Raman spectrum of epitaxial graphene on SiC(0001). New J. Phys. 15 (2013) 043031.

DOI: 10.1088/1367-2630/15/4/043031

[15] A.A. Balandin, Low-frequency 1/f noise in graphene devices. Nature Nanotechnology 8 (2013) 549-555.

DOI: 10.1038/nnano.2013.144

[16] I.A. Eliseyev, A.S. Usikov, S.P. Lebedev, et al. Raman scattering and low-frequency noise in epitaxial graphene chips. J. Phys.: Conf. Ser. 1697 (2020) 012130.

DOI: 10.1088/1742-6596/1697/1/012130

[17] I. Novodchuk, M. Bajcsy, M. Yavuz, Graphene-Based Field-Effect-Transistor Biosensors for breast canser detection: A review on biosensing strategy. Carbon 172 (2021) 432-453.

DOI: 10.1016/j.carbon.2020.10.048