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The Growth Mechanism of Dislocation Loops in Arsenic Implanted Silicon
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HomeMaterials Science ForumMaterials Science Forum Vols. 10-12Classification of Defects in Plastically Deformed...

Classification of Defects in Plastically Deformed Silicon

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Defects in Semiconductors 14

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Periodical:

Materials Science Forum (Volumes 10-12)

Pages:

745-750

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.10-12.745

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Online since:

January 1986

Authors:

C. Kisielowski-Kemmerich, J. Czaschke, H. Alexander

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© 1986 Trans Tech Publications Ltd. All Rights Reserved

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