The Growth Mechanism of Dislocation Loops in Arsenic Implanted Silicon

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Periodical:

Materials Science Forum (Volumes 10-12)

Edited by:

H.J. von Bardeleben

Pages:

751-756

Citation:

K. S. Jones et al., "The Growth Mechanism of Dislocation Loops in Arsenic Implanted Silicon", Materials Science Forum, Vols. 10-12, pp. 751-756, 1986

Online since:

January 1986

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