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The Growth Mechanism of Dislocation Loops in Arsenic Implanted Silicon

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Periodical:

Materials Science Forum (Volumes 10-12)

Pages:

751-756

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.10-12.751

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Online since:

January 1986

Authors:

Kevin S. Jones, S. Prussin, Eicke R. Weber

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© 1986 Trans Tech Publications Ltd. All Rights Reserved

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