Study on the Synthesis of SiC Powder Material by Using Induction Heating System

Fang Jiao; Zhou Li Wu; Dian Peng Cui; Mu Long Yang; Bo Yu Dong

doi:10.4028/www.scientific.net/MSF.1014.38

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HomeMaterials Science ForumMaterials Science Forum Vol. 1014Study on the Synthesis of SiC Powder Material by...

Study on the Synthesis of SiC Powder Material by Using Induction Heating System

Abstract:

By using a NAURA Advanced Physical Vapor Transport (PVT) System, the character ofthe synthesized SiC powder were studied. Mainly from the aspects of purity and particle size, and relevant experiments were designed to understand the influence of the powder source on the synthesized SiC powder. The results showed that the selection of Si powder source with appropriate particle size was conducive to increase the proportion of large particle size of SiC powder. In addition, the purification of material source in the early stage of the process was beneficial to improve the purity of SiC powder. The results showed successful preparation of optimized SiC powder and thus high-quality SiC wafers were made.

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Periodical:

Materials Science Forum (Volume 1014)

Pages:

38-42

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.1014.38

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Online since:

November 2020

Authors:

Fang Jiao*, Zhou Li Wu, Dian Peng Cui, Mu Long Yang, Bo Yu Dong

Keywords:

Grain Size, PVT System, SiC Powder, Synthesis

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