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HomeMaterials Science ForumMaterials Science Forum Vols. 117-118Morphology of Oxide Precipitates in Czochralski...

Morphology of Oxide Precipitates in Czochralski Silicon Crystals

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Shallow Impurities in Semiconductors V

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Periodical:

Materials Science Forum (Volumes 117-118)

Pages:

523-524

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.117-118.523

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Online since:

January 1993

Authors:

Koji Sueoka, N. Ikeda, T. Yamamoto, S. Kobayashi

Keywords:

Morpholoy, Silicon

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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