Morphology of Oxide Precipitates in Czochralski Silicon Crystals

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Periodical:

Materials Science Forum (Volumes 117-118)

Edited by:

Tsunemasa Taguchi

Pages:

523-524

DOI:

10.4028/www.scientific.net/MSF.117-118.523

Citation:

K. Sueoka et al., "Morphology of Oxide Precipitates in Czochralski Silicon Crystals ", Materials Science Forum, Vols. 117-118, pp. 523-524, 1993

Online since:

January 1993

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