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HomeMaterials Science ForumMaterials Science Forum Vols. 140-142Advanced Simulation of Dry Etching Process...

Advanced Simulation of Dry Etching Process Technology

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Plasma Properties, Deposition and Etching

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Periodical:

Materials Science Forum (Volumes 140-142)

Pages:

25-38

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.140-142.25

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Online since:

October 1993

Authors:

J. Pelka

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Сopyright:

© 1993 Trans Tech Publications Ltd. All Rights Reserved

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