DC Saddle-Field Plasma-Enhanced Vapour Deposition

Abstract:

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Periodical:

Materials Science Forum (Volumes 140-142)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

89-106

DOI:

10.4028/www.scientific.net/MSF.140-142.89

Citation:

R.V. Kruzelecky and S. Zukotynski, "DC Saddle-Field Plasma-Enhanced Vapour Deposition", Materials Science Forum, Vols. 140-142, pp. 89-106, 1993

Online since:

October 1993

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$35.00

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