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HomeMaterials Science ForumMaterials Science Forum Vols. 140-142Dissipative Structures and Nonequilibrium...

Dissipative Structures and Nonequilibrium Phenomena in Plasma-Surface Interaction

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Plasma Properties, Deposition and Etching

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Periodical:

Materials Science Forum (Volumes 140-142)

Pages:

133-158

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.140-142.133

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Online since:

October 1993

Authors:

Y.L. Khait

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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