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HomeMaterials Science ForumMaterials Science Forum Vols. 140-142Radical Kinetics in Processing Plasmas: Optical...

Radical Kinetics in Processing Plasmas: Optical Diagnostics of Gas Phase and Surface Reactions

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Plasma Properties, Deposition and Etching

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Periodical:

Materials Science Forum (Volumes 140-142)

Pages:

219-234

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.140-142.219

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Online since:

October 1993

Authors:

J.P. Booth, G. Hancock

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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