TEOS-Based Oxides: Deposition Dependent Properties

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Periodical:

Materials Science Forum (Volumes 140-142)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

269-284

DOI:

10.4028/www.scientific.net/MSF.140-142.269

Citation:

M. Saran and I. Emesh, "TEOS-Based Oxides: Deposition Dependent Properties", Materials Science Forum, Vols. 140-142, pp. 269-284, 1993

Online since:

October 1993

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$35.00

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