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HomeMaterials Science ForumMaterials Science Forum Vols. 140-142Preparation and Properties of PECVD Silicon...

Preparation and Properties of PECVD Silicon Nitride Films from SiH₄ + NH₃ and/or NF₃ and SiF₄+ NH₃ Gas Mixtures

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Periodical:

Materials Science Forum (Volumes 140-142)

Pages:

319-334

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.140-142.319

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Online since:

October 1993

Authors:

C. Gómez-Aleixandre, O. Sanchez, J.M. Albella

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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