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HomeMaterials Science ForumMaterials Science Forum Vols. 140-142Sputter Deposition of Thin Films for High Mobility...

Sputter Deposition of Thin Films for High Mobility Poly-Si TFT Fabrication

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Periodical:

Materials Science Forum (Volumes 140-142)

Pages:

387-404

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.140-142.387

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Online since:

October 1993

Authors:

T. Serikawa

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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