High Powered Pulsed Plasma Enhanced Deposition of Thin Film Semiconductor and Optical Materials

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Periodical:

Materials Science Forum (Volumes 140-142)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

421-438

DOI:

10.4028/www.scientific.net/MSF.140-142.421

Citation:

I.P. Llewellyn et al., "High Powered Pulsed Plasma Enhanced Deposition of Thin Film Semiconductor and Optical Materials", Materials Science Forum, Vols. 140-142, pp. 421-438, 1993

Online since:

October 1993

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$35.00

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