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HomeMaterials Science ForumMaterials Science Forum Vols. 140-142Plasma-Enhanced Chemical Vapour Deposition of...

Plasma-Enhanced Chemical Vapour Deposition of Coatings in the System Ti-B-N

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Periodical:

Materials Science Forum (Volumes 140-142)

Pages:

439-456

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.140-142.439

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Online since:

October 1993

Authors:

J. Laimer, H. Karner, H. Störi, P. Rödhammer

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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