Plasma-Enhanced Chemical Vapour Deposition of Coatings in the System Ti-B-N

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Periodical:

Materials Science Forum (Volumes 140-142)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

439-456

DOI:

10.4028/www.scientific.net/MSF.140-142.439

Citation:

J. Laimer et al., "Plasma-Enhanced Chemical Vapour Deposition of Coatings in the System Ti-B-N", Materials Science Forum, Vols. 140-142, pp. 439-456, 1993

Online since:

October 1993

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$35.00

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