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HomeMaterials Science ForumMaterials Science Forum Vols. 140-142Plasma-Enhanced Metalorganic Chemical Vapor...

Plasma-Enhanced Metalorganic Chemical Vapor Deposition for High Temperature Superconducting Thin Film

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Periodical:

Materials Science Forum (Volumes 140-142)

Pages:

457-464

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.140-142.457

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Online since:

October 1993

Authors:

Kenji Ebihara, Tomoaki Ikegami

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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