Doped Glasses for ULSI-Technology: Integration of Molecular Engineering and Plasma-CVD

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 140-142)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

359-380

DOI:

10.4028/www.scientific.net/MSF.140-142.359

Citation:

H. Treichel et al., "Doped Glasses for ULSI-Technology: Integration of Molecular Engineering and Plasma-CVD", Materials Science Forum, Vols. 140-142, pp. 359-380, 1993

Online since:

October 1993

Export:

Price:

$35.00

In order to see related information, you need to Login.