Bonding Configuration and Defects in Glow-Discharge Amorphous SiNx:H Films Deposited at 300°C and 500°C

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Periodical:

Materials Science Forum (Volumes 140-142)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

335-358

DOI:

10.4028/www.scientific.net/MSF.140-142.335

Citation:

S. Hasegawa et al., "Bonding Configuration and Defects in Glow-Discharge Amorphous SiNx:H Films Deposited at 300°C and 500°C", Materials Science Forum, Vols. 140-142, pp. 335-358, 1993

Online since:

October 1993

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