Practical Applications of In-Situ Plasma-Etching Diagnostic Techniques

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 140-142)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

171-190

Citation:

D.J. Thomas et al., "Practical Applications of In-Situ Plasma-Etching Diagnostic Techniques", Materials Science Forum, Vols. 140-142, pp. 171-190, 1993

Online since:

October 1993

Export:

Price:

$38.00