Theoretical Characterization of Electron Energy Distribution Function in RF Plasmas

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Periodical:

Materials Science Forum (Volumes 140-142)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

107-120

Citation:

M. Capitelli et al., "Theoretical Characterization of Electron Energy Distribution Function in RF Plasmas", Materials Science Forum, Vols. 140-142, pp. 107-120, 1993

Online since:

October 1993

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