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HomeMaterials Science ForumMaterials Science Forum Vols. 140-142Ion Energy Distributions and Sidewall Profiles in...

Ion Energy Distributions and Sidewall Profiles in Reactive Ion Etching

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Plasma Properties, Deposition and Etching

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Periodical:

Materials Science Forum (Volumes 140-142)

Pages:

121-132

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.140-142.121

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Online since:

October 1993

Authors:

Paul W. May, David P. Field, D.F. Klemperer, Y.P. Song

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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