U-Shaped Diffusion Profiles of Zn Atoms in GaAs by Electron Beam Doping

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Periodical:

Materials Science Forum (Volumes 143-147)

Edited by:

Helmut Heinrich and Wolfgang Jantsch

Pages:

1421-1426

Citation:

A. Takeda and T. Wada, "U-Shaped Diffusion Profiles of Zn Atoms in GaAs by Electron Beam Doping", Materials Science Forum, Vols. 143-147, pp. 1421-1426, 1994

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October 1993

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