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HomeMaterials Science ForumMaterials Science Forum Vols. 143-147U-Shaped Diffusion Profiles of Zn Atoms in GaAs by...

U-Shaped Diffusion Profiles of Zn Atoms in GaAs by Electron Beam Doping

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Defects in Semiconductors 17

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Periodical:

Materials Science Forum (Volumes 143-147)

Pages:

1421-1426

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.143-147.1421

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Online since:

October 1993

Authors:

A. Takeda, T. Wada

Keywords:

Electron Beam Doping, Surface Diffusion, U-Shaped Diffusion Profile

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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