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HomeMaterials Science ForumMaterials Science Forum Vols. 143-147Control of Size and Density of Stacking Fault in...

Control of Size and Density of Stacking Fault in Silicon by Gold Diffusion

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Defects in Semiconductors 17

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Periodical:

Materials Science Forum (Volumes 143-147)

Pages:

1523-1528

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.143-147.1523

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Online since:

October 1993

Authors:

Masami Morooka, Manabu Takahashi, Fumio Hashimoto

Keywords:

Defect Control, Gold, Lattice Defect, Point Defect, Silicon, Stacking Fault

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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