On the Influence of Transition Metal Impurities on the Oxygen Precipitation in CZ-Grown Silicon

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Periodical:

Materials Science Forum (Volumes 143-147)

Edited by:

Helmut Heinrich and Wolfgang Jantsch

Pages:

1529-1534

Citation:

M. Reiche, "On the Influence of Transition Metal Impurities on the Oxygen Precipitation in CZ-Grown Silicon", Materials Science Forum, Vols. 143-147, pp. 1529-1534, 1994

Online since:

October 1993

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