Phase Transitions at the Amorphous/Crystalline Interface in Ion-Implanted Silicon and Their Role in End-of-Range Defect Formation

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 143-147)

Edited by:

Helmut Heinrich and Wolfgang Jantsch

Pages:

1505-1510

DOI:

10.4028/www.scientific.net/MSF.143-147.1505

Citation:

M. Seibt et al., "Phase Transitions at the Amorphous/Crystalline Interface in Ion-Implanted Silicon and Their Role in End-of-Range Defect Formation", Materials Science Forum, Vols. 143-147, pp. 1505-1510, 1994

Online since:

October 1993

Export:

Price:

$35.00

In order to see related information, you need to Login.