Influence of Oxygen on External Phosphorus Gettering in Disordered Silicon Wafers

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Periodical:

Materials Science Forum (Volumes 143-147)

Edited by:

Helmut Heinrich and Wolfgang Jantsch

Pages:

1629-1634

DOI:

10.4028/www.scientific.net/MSF.143-147.1629

Citation:

S. Martinuzzi and I. Périchaud, "Influence of Oxygen on External Phosphorus Gettering in Disordered Silicon Wafers", Materials Science Forum, Vols. 143-147, pp. 1629-1634, 1994

Online since:

October 1993

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$35.00

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