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HomeMaterials Science ForumMaterials Science Forum Vols. 143-147The Diffusion of Gold during the Gettering...

The Diffusion of Gold during the Gettering Influence of Phosphorus

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Defects in Semiconductors 17

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Periodical:

Materials Science Forum (Volumes 143-147)

Pages:

1647-1652

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.143-147.1647

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Online since:

October 1993

Authors:

Horst Zimmermann

Keywords:

Gettering, Gold Diffusion, Phosphorus Diffusion, Self-Interstitial

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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