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HomeMaterials Science ForumMaterials Science Forum Vols. 143-147Phosphorus Diffusion Gettering of Gold in Silicon

Phosphorus Diffusion Gettering of Gold in Silicon

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Defects in Semiconductors 17

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Periodical:

Materials Science Forum (Volumes 143-147)

Pages:

1641-1646

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.143-147.1641

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Online since:

October 1993

Authors:

E.Ö. Sveinbjörnsson, Olof Engström, Ulf Södervall

Keywords:

DLTS, Gold Gettering, Gold Solubility, Segregation, Silicon Self-Interstitial, SIMS

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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