Phosphorus Diffusion Gettering of Gold in Silicon

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Periodical:

Materials Science Forum (Volumes 143-147)

Edited by:

Helmut Heinrich and Wolfgang Jantsch

Pages:

1641-1646

DOI:

10.4028/www.scientific.net/MSF.143-147.1641

Citation:

E. Ö. Sveinbjörnsson et al., "Phosphorus Diffusion Gettering of Gold in Silicon", Materials Science Forum, Vols. 143-147, pp. 1641-1646, 1994

Online since:

October 1993

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$35.00

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