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HomeMaterials Science ForumMaterials Science Forum Vols. 143-147Depth Distribution of Diffused Hydrogen in n-Type...

Depth Distribution of Diffused Hydrogen in n-Type GaAs

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Defects in Semiconductors 17

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Periodical:

Materials Science Forum (Volumes 143-147)

Pages:

933-938

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.143-147.933

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Cite this paper

Online since:

October 1993

Authors:

G. Roos, N.M. Johnson, C. Herring, J. Walker

Keywords:

GaAs, H Diffusion, H Plateau Formation, Hydrogen, SiH Complex

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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