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HomeMaterials Science ForumMaterials Science Forum Vols. 173-174Structural Investigation of Microcrystalline...

Structural Investigation of Microcrystalline Silicon

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Semiconductor Processing and Characterization with Lasers

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Periodical:

Materials Science Forum (Volumes 173-174)

Pages:

249-254

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.173-174.249

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Online since:

September 1994

Authors:

P. Hapke, M. Luysberg, Reinhard Carius, F. Finger, H. Wagner

Keywords:

Microcrystallinity, Percolation, Raman Spectroscopy, TEM

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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