Short-Range Order and Structure of Silicon Dioxide and Silicon Nitride Layers

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Periodical:

Materials Science Forum (Volumes 185-188)

Edited by:

K.E. Heusler

Pages:

285-292

DOI:

10.4028/www.scientific.net/MSF.185-188.285

Citation:

E.A. Repnikova and V.A. Gurtov, "Short-Range Order and Structure of Silicon Dioxide and Silicon Nitride Layers", Materials Science Forum, Vols. 185-188, pp. 285-292, 1995

Online since:

March 1995

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$35.00

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