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Structure of Aluminium Oxide Films and its Changes due to Thermal and Electrochemical Processes
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HomeMaterials Science ForumMaterials Science Forum Vols. 185-188Short-Range Order and Structure of Silicon Dioxide...

Short-Range Order and Structure of Silicon Dioxide and Silicon Nitride Layers

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Passivation of Metals and Semiconductors

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Periodical:

Materials Science Forum (Volumes 185-188)

Pages:

285-292

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.185-188.285

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Online since:

March 1995

Authors:

E.A. Repnikova, V.A. Gurtov

Keywords:

Amorphous Layer, Porosity, Short Range Order (SRO), X-Raying

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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