HRTEM Study of Atomic Faceting Interfaces of Σ=3 NiSi2/Si on (011) Si Substrate

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Periodical:

Materials Science Forum (Volumes 189-190)

Main Theme:

Edited by:

B.C. Muddle

Pages:

135-142

DOI:

10.4028/www.scientific.net/MSF.189-190.135

Citation:

W.J. Chen and F.-R. Chen, "HRTEM Study of Atomic Faceting Interfaces of Σ=3 NiSi2/Si on (011) Si Substrate", Materials Science Forum, Vols. 189-190, pp. 135-142, 1995

Online since:

July 1995

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