Characterisation of the Mechanical Properties of Thin Film Cantilevers with the Atomic Force Microscope

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Periodical:

Materials Science Forum (Volumes 189-190)

Main Theme:

Edited by:

B.C. Muddle

Pages:

107-114

DOI:

10.4028/www.scientific.net/MSF.189-190.107

Citation:

C.J. Drummond and T.J. Senden, "Characterisation of the Mechanical Properties of Thin Film Cantilevers with the Atomic Force Microscope", Materials Science Forum, Vols. 189-190, pp. 107-114, 1995

Online since:

July 1995

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$35.00

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