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HomeMaterials Science ForumMaterials Science Forum Vols. 189-190Characterisation of the Mechanical Properties of...

Characterisation of the Mechanical Properties of Thin Film Cantilevers with the Atomic Force Microscope

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Interfaces II

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Periodical:

Materials Science Forum (Volumes 189-190)

Pages:

107-114

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.189-190.107

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Online since:

July 1995

Authors:

C.J. Drummond, T.J. Senden

Keywords:

Atomic Force Microscope (AFM), Density, Low Pressure Chemical Vapour Deposition, Mechanical Property, Spring Constant, Thin Film, Young's Modulus

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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