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Effect of Carbon on Thermal Double Donor Formation in Silicon

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1315-1320

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1315

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Online since:

November 1995

Authors:

L.I. Murin, V.P. Markevich

Keywords:

Carbon, Oxygen, Silicon, Thermal Double Donors

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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