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HomeMaterials Science ForumMaterials Science Forum Vols. 228-231Structure Parameter Determination of Thin Films by...

Structure Parameter Determination of Thin Films by Intensity Fitting in GIABD-Geometry

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Periodical:

Materials Science Forum (Volumes 228-231)

Pages:

295-300

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.228-231.295

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Online since:

July 1996

Authors:

J. Klimke, Harm Wulff

Keywords:

Grazing Incidence Diffractometry, Non-Homogeneous Layer, Reflectometry, Thin Film, Titanium Nitride TiN

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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