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HomeMaterials Science ForumMaterials Science Forum Vols. 228-231X-Ray Diffraction Microstructural Characterization...

X-Ray Diffraction Microstructural Characterization of PZT (Pb(Zr_xTi_1-x)O₃ and Pt Thin Films on TiN/Ti/BPSG/Si Structures

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Periodical:

Materials Science Forum (Volumes 228-231)

Pages:

487-492

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.228-231.487

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Online since:

July 1996

Authors:

F. Varnière, B. Ea Kim, R. Bisaro, G. Chevrier

Keywords:

Pt Thin Film Characterization, PZT Thin Film Characterization

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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