X-Ray Diffraction Microstructural Characterization of PZT (Pb(ZrxTi1-x)O3 and Pt Thin Films on TiN/Ti/BPSG/Si Structures

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Periodical:

Materials Science Forum (Volumes 228-231)

Edited by:

R.J. Cernik, R. Delhez and E.J. Mittemeijer

Pages:

487-492

DOI:

10.4028/www.scientific.net/MSF.228-231.487

Citation:

F. Varnière et al., "X-Ray Diffraction Microstructural Characterization of PZT (Pb(ZrxTi1-x)O3 and Pt Thin Films on TiN/Ti/BPSG/Si Structures", Materials Science Forum, Vols. 228-231, pp. 487-492, 1996

Online since:

July 1996

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