X-Ray Reflectivity and Diffuse Scattering Study of Thermally Treated W1-xSix/Si Multilayers

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Periodical:

Materials Science Forum (Volumes 228-231)

Edited by:

R.J. Cernik, R. Delhez and E.J. Mittemeijer

Pages:

505-510

DOI:

10.4028/www.scientific.net/MSF.228-231.505

Citation:

M. Jergel et al., "X-Ray Reflectivity and Diffuse Scattering Study of Thermally Treated W1-xSix/Si Multilayers", Materials Science Forum, Vols. 228-231, pp. 505-510, 1996

Online since:

July 1996

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$35.00

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