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HomeMaterials Science ForumMaterials Science Forum Vols. 248-249Application of High Energy Ion Beams for Local...

Application of High Energy Ion Beams for Local Lifetime Control in Silicon

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Materials Science Applications of Ion Beam Techniques

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Periodical:

Materials Science Forum (Volumes 248-249)

Pages:

225-228

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.248-249.225

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Online since:

May 1997

Authors:

Pavel Hazdra, Jan Vobecký

Keywords:

Deep Level, Helium Irradiation, Lifetime Control

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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