Lattice Damage of Relaxed Si1-xGex Alloys of Various Composition Implanted with 2 MeV Si Ions

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Periodical:

Materials Science Forum (Volumes 248-249)

Edited by:

A.G. Balogh and G. Walter

Pages:

241-244

DOI:

10.4028/www.scientific.net/MSF.248-249.241

Citation:

J.K.N. Lindner "Lattice Damage of Relaxed Si1-xGex Alloys of Various Composition Implanted with 2 MeV Si Ions", Materials Science Forum, Vols. 248-249, pp. 241-244, 1997

Online since:

May 1997

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