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HomeMaterials Science ForumMaterials Science Forum Vols. 248-249Pulsed Electron Beam Annealing of GaAs after High...

Pulsed Electron Beam Annealing of GaAs after High Dose Implantation of Hydrogen

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Materials Science Applications of Ion Beam Techniques

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Periodical:

Materials Science Forum (Volumes 248-249)

Pages:

253-256

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.248-249.253

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Online since:

May 1997

Authors:

T. Hauser, L. Bredell, H. Gaigher, H. Alberts, A. Botha, M. Hayes, E. Friedland

Keywords:

GaAs, Hydrogen Implantation, PEBA

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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