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HomeMaterials Science ForumMaterials Science Forum Vols. 248-249Damage Production in Ion Implanted III-V...

Damage Production in Ion Implanted III-V Compounds: A Comparative Study

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Materials Science Applications of Ion Beam Techniques

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Periodical:

Materials Science Forum (Volumes 248-249)

Pages:

261-266

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.248-249.261

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Online since:

May 1997

Authors:

Elke Wendler

Keywords:

Critical Temperatures, Damage Production, GaAs, GaP, InAs, InP, Ion Implantation, Rutherford Backscattering Analysis

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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