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HomeMaterials Science ForumMaterials Science Forum Vols. 248-249Dose Rate and Temperature Dependence of the...

Dose Rate and Temperature Dependence of the Crystallization Rate during IBIEC in InAs

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Materials Science Applications of Ion Beam Techniques

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Periodical:

Materials Science Forum (Volumes 248-249)

Pages:

257-260

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.248-249.257

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Online since:

May 1997

Authors:

Robert Schulz, T. Fehlhaber, E. Glaser, F. Schrempel

Keywords:

Dose Rate Dependence, IBIEC, InAs, Ion Beam Induced Nucleation, Ion Implantation

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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