Auger Depth Profiling with Good Depth Resolution of Low Energy Implantation Induced Ion Mixing

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Periodical:

Materials Science Forum (Volumes 248-249)

Edited by:

A.G. Balogh and G. Walter

Pages:

245-248

DOI:

10.4028/www.scientific.net/MSF.248-249.245

Citation:

A. Sulyok et al., "Auger Depth Profiling with Good Depth Resolution of Low Energy Implantation Induced Ion Mixing", Materials Science Forum, Vols. 248-249, pp. 245-248, 1997

Online since:

May 1997

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$35.00

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