Plasma Immersion Ion Implantation of Nitrogen into Porous Silicon Layers

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Periodical:

Materials Science Forum (Volumes 248-249)

Edited by:

A.G. Balogh and G. Walter

Pages:

233-236

Citation:

A. Manuaba et al., "Plasma Immersion Ion Implantation of Nitrogen into Porous Silicon Layers", Materials Science Forum, Vols. 248-249, pp. 233-236, 1997

Online since:

May 1997

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$38.00

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