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HomeMaterials Science ForumMaterials Science Forum Vols. 248-249Investigation of the Morphology of Porous Silicon...

Investigation of the Morphology of Porous Silicon by Rutherford Backscattering Spectrometry

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Materials Science Applications of Ion Beam Techniques

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Periodical:

Materials Science Forum (Volumes 248-249)

Pages:

373-376

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.248-249.373

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Online since:

May 1997

Authors:

E. Szilágyi, Z. Hajnal, F. Pászti, O. Buiu, G. Craciun, C. Cobianu, C. Savaniu, É. Vázsonyi

Keywords:

Ion Beam Analysis, Morpholoy, Porous Silicon (PS), Rutherford Backscattering Spectrometry

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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